We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3 ... Frontiers | Low-Loss Slot Waveguides with Silicon (111 ... We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3 ... Low-loss slot waveguides with silicon (111) surfaces ... 9 Keywords: silicon photonics, waveguide, anisotropic wet etching, slot waveguide, integrated 10 photonics. 11 Abstract 12 We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides 13 oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam
Horizontal Slot Waveguides for Silicon Photonics Back-End ...
Efficient and broadband polarization rotator using horizontal ... Efficient and broadband polarization rotator using horizontal slot waveguide for silicon photonics Huijuan Zhang,1,a) Suchandrima Das,2,3 Ying Huang,1 Chao Li,1 Shiyi Chen,1 Haifeng Zhou,1 Mingbin Yu,1 Patrick Guo-Qiang Lo,1 and John T. L. Thong2,b) 1Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, ... IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 28, NO. 1, JANUARY 1,... IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 28, NO. 1, JANUARY 1, 2016 19 Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm Xiangdong Li, Xue Feng, Xian Xiao, Yihang Li, Kaiyu Cui, Fang Liu, and Yidong Huang, Member, IEEE Abstract—Silicon slot waveguides operating at a wavelength Frontiers | Low-Loss Slot Waveguides with Silicon (111) Surfaces... We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3 ... Frontiers | Low-Loss Slot Waveguides with Silicon (111 ...
Polysilicon Waveguides for Silicon Photonics | Cambridge…
Silicon-organic Hybrid Electro-optic Modulator Based on Abstract: A silicon-organic hybrid electro-optic (EO) modulator based on one-dimensional photonic crystal slot waveguides is proposed and demonstrated. Effective EO coefficient up to 490 pm/V is observed as a result of the slow group velocity in the proposed structure. IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 28, NO. 1, … IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 28, NO. 1, JANUARY 1, 2016 19 Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm Xiangdong Li, Xue Feng, Xian Xiao, Yihang Li, Kaiyu Cui, Fang Liu, and Yidong Huang, Member, IEEE Abstract—Silicon slot waveguides operating at … Silicon photonics - Wikipedia Silicon photonics is the study and application of photonic systems which use silicon as an optical medium. The silicon is usually patterned with sub-micrometre precision, into microphotonic components. Ultra-high on-chip optical gain in erbium-based hybrid slot ...
OSA | Nonlinearity of optimized silicon photonic slot waveguides
Epsilon-Near-Zero Si Slot-Waveguide Modulator - ACS Photonics ... Oct 4, 2018 ... We experimentally demonstrate a broadband electro-absorption modulator exploiting indium tin oxide (ITO) as the active switching material. Si ... Frontiers | Low-Loss Slot Waveguides with Silicon (111) Surfaces ... The slot waveguide structure was first proposed by Almeida et al. (2004) as a simple way to achieve extremely strong optical confinement in a low refractive ... Controlling evanescent waves using silicon photonic all-dielectric ... May 14, 2018 ... Our approach marks a departure from interference-based confinement as in photonic crystals or slot waveguides, which utilize nanoscale field ...
Silicon Photonics: Designing and Prototyping Silicon ...
Novel materials and optical waveguide systems for … Finally, a one-dimensional photonic crystal structure based on horizontal slot waveguide with a photonic band gap around 1.55 μm has also been designed and optically characterized. Finally, the last part of this thesis will be devoted to the characterization of Silicon on Insulators Multi-Resonators.
Silicon photonics is the study and application of photonic systems which use silicon as an optical medium. The silicon is usually patterned with sub-micrometre precision, into microphotonic components. These operate in the infrared, most commonly at the 1.55 micrometre wavelength used by most fiber optic telecommunication systems. The silicon typically lies on top of a layer of silica in what ... Horizontal Slot Waveguides for Silicon Photonics Back-End... The work demonstrates an alternative solution to costly silicon-on-insulator photonics. The proposed solution uses bulk silicon wafers and thin film deposited waveguides. Back-end deposited horizontal slot grating couplers and waveguides are realized by multi-layers of amorphous silicon and high-k materials.